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CMU Intellectual Repository
Browsing by Author Harry J. Whitlow
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Showing results 1 to 6 of 6
Issue Date
Title
Author(s)
12-Jul-2011
Direct writing of channels for microfluidics in silica by MeV ion beam lithography
Nitipon Puttaraksa
;
Mari Napari
;
Orapin Chienthavorn
;
Rattanaporn Norarat
;
Timo Sajavaara
;
Mikko Laitinen
;
Somsorn Singkarat
;
Harry J. Whitlow
1-Feb-2013
Fast and blister-free irradiation conditions for cross-linking of PMMA induced by 2 MeV protons
Somrit Unai
;
Nitipon Puttaraksa
;
Nirut Pussadee
;
Kanda Singkarat
;
Michael W. Rhodes
;
Harry J. Whitlow
;
Somsorn Singkarat
27-Feb-2012
Influence of MeV H + ion beam flux on cross-linking and blister formation in PMMA resist
Somrit Unai
;
Nitipon Puttaraksa
;
Nirut Pussadee
;
Kanda Singkarat
;
Michael W. Rhodes
;
Harry J. Whitlow
;
Somsorn Singkarat
1-Feb-2012
Lithography exposure characteristics of poly(methyl methacrylate) (PMMA) for carbon, helium and hydrogen ions
Nitipon Puttaraksa
;
Rattanaporn Norarat
;
Mikko Laitinen
;
Timo Sajavaara
;
Somsorn Singkarat
;
Harry J. Whitlow
13-Oct-2008
Programmable proximity aperture lithography with MeV ion beams
Nitipon Puttaraksa
;
Sergey Gorelick
;
Timo Sajavaara
;
Mikko Laitinen
;
Somsorn Singkarat
;
Harry J. Whitlow
1-Dec-2007
Resolution performance of programmable proximity aperture MeV ion beam lithography system
Sergey Gorelick
;
Timo Sajavaara
;
Mikko Laitinen
;
Nitipon Puttaraksa
;
Harry J. Whitlow