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dc.contributor.authorT. Bannuruen_US
dc.contributor.authorS. Narksitipanen_US
dc.contributor.authorW. L. Brownen_US
dc.contributor.authorR. P. Vincien_US
dc.description.abstractAu, Au-V solid solution, and Au-V2O5dispersion films were fabricated for comparison of electrical and mechanical characteristics. Resistivity and nanoindentation hardness increased with increasing V content in all films, but the ratio of resistivity increase to hardness increase was much lower for the Au-V2O5films. Measurements of contact force and electrical contact resistance between pairs of Au or Au-V films show that increased hardness and resistivity in the alloy films results in higher contact resistance and less adhesion than in pure Au. These results imply that the Au-V2O5films may exhibit attractive behavior when used in a contact configuration, but this has not yet been tested.en_US
dc.subjectPhysics and Astronomyen_US
dc.titleEffects of V additions on the mechanical behavior of Au thin films for MEMS contact switchesen_US
dc.typeConference Proceedingen_US
article.title.sourcetitleProceedings of SPIE - The International Society for Optical Engineeringen_US
article.volume6463en_US Universityen_US Mai Universityen_US
Appears in Collections:CMUL: Journal Articles

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