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|Title:||A self-DLC coated cathode plasma source|
|Keywords:||Chemistry;Materials Science;Physics and Astronomy|
|Abstract:||A novel self-microwave plasma source modified by diamond-like carbon (DLC) coating self-cathode for density enhancement was devised. This simple method had been once routed for enhanced efficient microwave plasma with very low-cost. The coating parameters in fabrication of the self-coated DLC cathode for plasma density enhancement were investigated. DLC-Al cathodes coating by self cathode of microwave plasma source were fabricated to control and yielded strong non-activated emission. The novel cathodes showed enhancement of current density up to 240%. In addition, the contamination in the plasma source could be avoided with the new cathodes. Crown Copyright © 2009.|
|Appears in Collections:||CMUL: Journal Articles|
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