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Title: A self-DLC coated cathode plasma source
Authors: A. Deachana
D. Boonyawan
B. Yodsombat
Keywords: Chemistry
Materials Science
Physics and Astronomy
Issue Date: 15-Jun-2009
Abstract: A novel self-microwave plasma source modified by diamond-like carbon (DLC) coating self-cathode for density enhancement was devised. This simple method had been once routed for enhanced efficient microwave plasma with very low-cost. The coating parameters in fabrication of the self-coated DLC cathode for plasma density enhancement were investigated. DLC-Al cathodes coating by self cathode of microwave plasma source were fabricated to control and yielded strong non-activated emission. The novel cathodes showed enhancement of current density up to 240%. In addition, the contamination in the plasma source could be avoided with the new cathodes. Crown Copyright © 2009.
ISSN: 02578972
Appears in Collections:CMUL: Journal Articles

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