A self-DLC coated cathode plasma source

A. Deachana; D. Boonyawan; B. Yodsombat

Please use this identifier to cite or link to this item: http://cmuir.cmu.ac.th/jspui/handle/6653943832/59475

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DC Field	Value	Language
dc.contributor.author	A. Deachana	en_US
dc.contributor.author	D. Boonyawan	en_US
dc.contributor.author	B. Yodsombat	en_US
dc.date.accessioned	2018-09-10T03:15:45Z	-
dc.date.available	2018-09-10T03:15:45Z	-
dc.date.issued	2009-06-15	en_US
dc.identifier.issn	02578972	en_US
dc.identifier.other	2-s2.0-67349127573	en_US
dc.identifier.other	10.1016/j.surfcoat.2009.02.132	en_US
dc.identifier.uri	https://www.scopus.com/inward/record.uri?partnerID=HzOxMe3b&scp=67349127573&origin=inward	en_US
dc.identifier.uri	http://cmuir.cmu.ac.th/jspui/handle/6653943832/59475	-
dc.description.abstract	A novel self-microwave plasma source modified by diamond-like carbon (DLC) coating self-cathode for density enhancement was devised. This simple method had been once routed for enhanced efficient microwave plasma with very low-cost. The coating parameters in fabrication of the self-coated DLC cathode for plasma density enhancement were investigated. DLC-Al cathodes coating by self cathode of microwave plasma source were fabricated to control and yielded strong non-activated emission. The novel cathodes showed enhancement of current density up to 240%. In addition, the contamination in the plasma source could be avoided with the new cathodes. Crown Copyright © 2009.	en_US
dc.subject	Chemistry	en_US
dc.subject	Materials Science	en_US
dc.subject	Physics and Astronomy	en_US
dc.title	A self-DLC coated cathode plasma source	en_US
dc.type	Journal	en_US
article.title.sourcetitle	Surface and Coatings Technology	en_US
article.volume	203	en_US
article.stream.affiliations	Chiang Mai University	en_US
article.stream.affiliations	Songkhla Rajabhat University	en_US
Appears in Collections:	CMUL: Journal Articles

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