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http://cmuir.cmu.ac.th/jspui/handle/6653943832/33800| Title: | Development of high energy metal vapor vacuum arc ion source for establishment of ion implantation technology = การพัฒนาแหล่งกำเนิดไอออนโลหะพลังงานสูงชนิดอาร์กในสุญญากาศเพื่อสร้างเทคโนโลยีไอออนอิมพลานเตชัน / Yeelord Chutopa |
| Authors: | Chutopa, Yeelord |
| Authors: | Chutopa, Yeelord |
| Keywords: | Vapors;Ion implantation |
| Issue Date: | 2003 |
| Publisher: | Chiang Mai : Graduate School, Chiang Mai University, 2003 |
| Gov't Doc #: | Th 530.416 C564D |
| URI: | http://search.lib.cmu.ac.th/search/?searchtype=.&searcharg=b1347469 http://cmuir.cmu.ac.th/handle/6653943832/33800 |
| Appears in Collections: | SCIENCE: Theses |
Files in This Item:
| File | Description | Size | Format | |
|---|---|---|---|---|
| phys0903cy_tpg.pdf | 550.02 kB | Adobe PDF | View/Open Request a copy | |
| phys0903cy_abs.pdf | 476.72 kB | Adobe PDF | View/Open | |
| phys0903cy_con.pdf | 524.43 kB | Adobe PDF | View/Open Request a copy | |
| phys0903cy_ch1.pdf | 530.94 kB | Adobe PDF | View/Open Request a copy | |
| phys0903cy_ch2.pdf | 669 kB | Adobe PDF | View/Open Request a copy | |
| phys0903cy_ch3.pdf | 1.47 MB | Adobe PDF | View/Open Request a copy | |
| phys0903cy_ch4.pdf | 610.19 kB | Adobe PDF | View/Open Request a copy | |
| phys0903cy_ch5.pdf | 466.48 kB | Adobe PDF | View/Open Request a copy | |
| phys0903cy_bib.pdf | 466.98 kB | Adobe PDF | View/Open Request a copy | |
| phys0903cy_app.pdf | 1.13 MB | Adobe PDF | View/Open Request a copy |
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