Please use this identifier to cite or link to this item: http://cmuir.cmu.ac.th/jspui/handle/6653943832/33543
Title: High precision 30 kV vertical ion implantation system / Nonglak Tondee
Authors: Nonglak Tondee
Authors: Nonglak Tondee
Keywords: Ion implantation
Issue Date: 2002
Publisher: Chiang Mai : Graduate School, Chiang Mai University, 2002
Gov't Doc #: Th 530.416 N812H
URI: http://search.lib.cmu.ac.th/search/?searchtype=.&searcharg=b1313090
http://cmuir.cmu.ac.th/handle/6653943832/33543
Appears in Collections:SCIENCE: Theses



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