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Browsing by Author Jeon G. Han

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Issue Date	Title	Author(s)
7-Jan-2020	Effect of helium incorporation on plasma parameters and characteristic properties of hydrogen free carbon films deposited using DC magnetron sputtering	Bibhuti B. Sahu; Sung I. Kim; Min W. Lee; Jeon G. Han
5-Jan-2016	Integrated approach for low-temperature synthesis of high-quality silicon nitride films in PECVD using RF-UHF hybrid plasmas	B. B. Sahu; Kyung S. Shin; Jeon G. Han
15-Sep-2020	Plasma diagnostic in LiMn<inf>2</inf>O<inf>4</inf> thin film process for Li-ion battery application	Bibhuti B. Sahu; Seok H. Kim; Sehwan Kim; Jeon G. Han; Sunkook Kim
1-Nov-2015	SiC<inf>x</inf>H<inf>y</inf>-based hydrophobic thin films with good chemical and mechanical properties synthesized by PECVD at various substrate temperatures	Jun S. Lee; Su B. Jin; N. Vichiansan; Jeon G. Han; M. Hori; K. Leksakul

Showing results 1 to 4 of 4