Electrical and optical properties of ITO/Au/ITO multilayer films for high performance TCO films

Abstract

Effects of a sandwich metallic gold layer on electrical and optical properties of ITO films were investigated in this study. ITO/metal/ITO multilayer films were deposited on borosilicate glass using ultrasonic spray pyrolysis in air atmosphere for the ITO. The metallic layer of Au was coated via a sputtering process in the thickness range of 5-20 nm. The addition of the metallic layer enhanced conductivity, but reduced the transmittance in the multilayer films. ITO/Au/ITO multilayer films have much lower resistivity than ITO single layer film of the same thickness. The ITO/10nm Au/ITO film had the maximum figure of merit or the best performance of these samples. © 2013 Copyright Taylor and Francis Group, LLC.