Browsing by Author Kyung S. Shin
Showing results 1 to 1 of 1
| Issue Date | Title | Author(s) |
|---|---|---|
| 5-Jan-2016 | Integrated approach for low-temperature synthesis of high-quality silicon nitride films in PECVD using RF-UHF hybrid plasmas | B. B. Sahu; Kyung S. Shin; Jeon G. Han |