Browsing by Author B. B. Sahu
Showing results 2 to 2 of 2
< previous
Issue Date | Title | Author(s) |
---|---|---|
5-Jan-2016 | Integrated approach for low-temperature synthesis of high-quality silicon nitride films in PECVD using RF-UHF hybrid plasmas | B. B. Sahu; Kyung S. Shin; Jeon G. Han |