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CMU Intellectual Repository
Browsing by Author C. Pakpum
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Showing results 1 to 4 of 4
Issue Date
Title
Author(s)
25-Nov-2016
Air bearing surface recessed steep wall via optical proximity correction mask and fluorine-based plasma etching
C. Pakpum
;
N. Pussadee
25-Nov-2016
Deep reactive ion etching of alumina titanium carbide using chlorine-based plasma
C. Pakpum
;
N. Pussadee
1-Jan-2005
Diamond-like carbon formed by plasma immersion ion implantation and deposition technique on 304 stainless steel
C. Pakpum
;
N. Pasaja
;
D. Boonyawan
;
P. Suanpoot
;
P. Srisantithum
;
C. Silawatshananai
;
T. Vilaithong
15-Sep-2020
Redeposition-free of silicon etching by CF<inf>4</inf> microwave plasma in a medium vacuum process regime
C. Pakpum
;
D. Boonyawan